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Authors
Author
J. Murota
Books
SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices
D. Harame, S. Miyazaki, A. Ogura, M. Caymax, G. Masini, G. Niu, B. Vincent, J. Murota, M. Heyns, A. Reznicek, K. Saraswat, B. Tillack, Y. C. Yeo
ULSI Process Integration 7
C. Claeys, H. Iwai, M. Tao, S. Deleonibus, J. Murota