W. Murray Bullis

David G. Seiler

Alain C. Diebold

Market: Those in government, industry, and academia interested in state-of-the-art knowledge on semiconductor characterization for research, development, and manufacturing. Based on papers given at an International Nist Workshop in January 1995, Semiconductor Characterization covers the unique characterization requirements of both silicon IC development and manufacturing, and compound semiconductor materials, devices, and manufacturing. Additional sections discuss technology trends and future requirements for compound semiconductor applications. Also highlighted are recent developments in characterization, including in- situ, in-FAB, and off-line analysis methods. The book provides a concise, effective portrayal of industry needs and problems in the important specialty of metrology for semiconductor technology.

Present Status and Future Need

Semiconductor Characterization

Conrad J. Dell'Oca

Proceedings of the First International Symposium on Very Large Scale Integration Science and Technology

VLSI Science and Technology/1982

Progress Report, January 1 to June 30, 1976

Semiconductor Measurement Technology

W. Murray Bullis

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