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Smart Sensors, Actuators, and MEMS
Society of Photo-optical Instrumentation Engineers
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Society of Photo-optical Instrumentation Engineers
Smart Sensors, Actuators, and MEMS
19-21 May 2003, Maspalomas, Gran Canaria, Spain
Society of Photo-optical Instrumentation Engineers,
V. K. Varadan,
Jung-Chih Chiao,
Carles Cané,
Universidad de Las Palmas de Gran Canaria
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