Physics and Technology of High-k Gate Dielectrics 5
Physics and Technology of High-k Gate Dielectrics 5Samares Kar
Sign up to use
Physics and Technology of High-k Gate Dielectrics 5

Physics and Technology of High-k Gate Dielectrics 5

Sign up to use
Sign up to use
This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.