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Microfluidics, BioMEMS, and Medical Microsystems
Society of Photo-optical Instrumentation Engineers
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Society of Photo-optical Instrumentation Engineers
Microfluidics, BioMEMS, and Medical Microsystems
27-29 January 2003, San Jose, California, USA
Society of Photo-optical Instrumentation Engineers,
Semiconductor Equipment and Materials International,
Sandia National Laboratories,
Solid State Technology (Organization)
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