Micro-actuators and Flexure Springs for Micro-scanning Tunneling Microscope Arrays
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Micro-actuators and Flexure Springs for Micro-scanning Tunneling Microscope Arrays

Yang Xu2000
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Two versions of Micro-Scanning Tunneling Microscopes (Micro-STMs) have been fabricated. The Micro-STMs are fabricated from Single Crystal Silicon (SCS) using the high-aspect-ratio SCREAM process, integrated with high aspect ratio Single Crystal Silicon (SCS) tips.

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