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Authors
Author
Electrochemical Society. Dielectric Science and Technology Division
Books
Chemical Vapor Deposition
Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. High Temperature Materials Division
Silicon Nitride and Silicon Dioxide Thin Insulating Films
Electrochemical Society. Dielectric Science and Technology Division
Fundamental Gas-phase and Surface Chemistry of Vapor-phase Deposition II and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV
Electrochemical Society. Dielectric Science and Technology Division, M. Meyyapan, Electrochemical Society. High Temperature Materials Division
Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries
Electrochemical Society. Dielectric Science and Technology Division
Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II
G. S. Mathad, Electrochemical Society. Electrodeposition Division, Electrochemical Society. Dielectric Science and Technology Division
