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Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II
G. S. Mathad
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G. S. Mathad
Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II
Proceedings of the International Symposium
G. S. Mathad,
Electrochemical Society. Electrodeposition Division,
Electrochemical Society. Dielectric Science and Technology Division
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